TERMIUM Plus®

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PLASMA CLEANER [1 record]

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Record 1 2016-02-26

English

Subject field(s)
  • Industrial Techniques and Processes
  • Chemical Engineering
DEF

A plasma system configured to clean parts[.]

French

Domaine(s)
  • Techniques industrielles
  • Génie chimique
CONT

Les réseaux de nanotrous utilisés [...] ont tous été gravés par oxygène. Un nettoyeur par plasma [...] a été utilisé. Les échantillons sont placés dans la chambre [...] Le couvercle est ensuite fermé et la pompe à vide est mise en fonction pour réduire la pression afin qu’elle soit propice à la formation du plasma. Après un temps déterminé (typiquement 20 minutes), la source est allumée pour créer le plasma qui grave les sphères.

Spanish

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